Development of the Two-Shaping-Elements (TSE) method for silicon sheet growth

✍ Scribed by S.K. Brantov; K.N. Filonov; B.M. Epelbaum; L.V. Miheeva; A.M. Sitnikov

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 464 KB
• Volume: 104
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(90)90315-c