✦ LIBER ✦
Development of the precision planar motor stage using a new magnet array and robust control with the parametric uncertainty model
✍ Scribed by Hyun-Jang Shin; Heui-Jae Pahk
- Publisher
- Springer
- Year
- 2006
- Tongue
- English
- Weight
- 594 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0268-3768
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