Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering

✍ Scribed by Greene, J. E.; Sundgren, J.-E.; Hultman, L.; Petrov, I.; Bergstrom, D. B.

• Book ID: 120219639
• Publisher: American Institute of Physics
• Year: 1995
• Tongue: English
• Weight: 501 KB
• Volume: 67
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.114845