Development of practical system for laser-induced plasma-assisted ablation (LIPAA) for micromachining of glass materials

✍ Scribed by Y. Hanada; K. Sugioka; Y. Gomi; H. Yamaoka; O. Otsuki; I. Miyamoto; K. Midorikawa

• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 172 KB
• Volume: 79
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-004-2614-1