Carbon-based molecular sieve membranes f
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Liang-Jun Wang; Franklin Chau-Nan Hong
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Article
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2005
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Elsevier Science
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English
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Carbon-based molecular sieve (CMS) films for gas separation have been deposited on porous Al 2 O 3 disks using hexamethyldisiloxane (HMDSO) by a remote inductively-coupled-plasma (ICP) chemical vapor deposition (CVD) method. The H 2 /N 2 selectivities of the as-deposited films falled into the range