✦ LIBER ✦
Development of numerical model for reactions in fluidized bed grid zone-application to chemical vapor deposition of polycrystalline silicon by monosilane pyrolysis-
✍ Scribed by T. Kojima; T. Kimura; M. Matsukata
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 768 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0009-2509
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