Development of large area sputter-coating method using magnetized a.c. plasmas with inclined electrodes

✍ Scribed by Yoshinobu Matsuda; Kiyoshi Kuwahara; Hiroshu Fujiyama

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 422 KB
• Volume: 140
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/0921-5093(91)90479-7