Development of ion irradiation system for in situ observation of ion irradiated semiconductor surfaces by ultra high vacuum scanning tunneling microscope

✍ Scribed by J. Ishikawa; H. Tsuji; K. Kameyama; S. Shimada; Y. Gotoh

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 310 KB
• Volume: 100-101
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(96)00244-9