Development of in situ, at-wavelength metrology for soft X-ray nano-focusing

✍ Scribed by Sheng Yuan; Valeriy V. Yashchuk; Kenneth A. Goldberg; Richard Celestre; Wayne R. McKinney; Gregory Y. Morrison; Tony Warwick; Howard A. Padmore

• Book ID: 113821689
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 205 KB
• Volume: 649
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2010.10.134