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Development of highly conducting p-type μc-Si:H films from minor diborane doping in highly hydrogenated SiH4 plasma

✍ Scribed by Debajyoti Das; Madhusudan Jana


Book ID
116730101
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
351 KB
Volume
58
Category
Article
ISSN
0167-577X

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