High resolution electron beam lithograph
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Bo Cui; Teodor Veres
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Article
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2008
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Elsevier Science
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English
β 425 KB
We report in this paper that typical solvent developers for PMMA can be used to develop PMGI (polydimethyl glutarimide) with a contrast much higher than that reported using base developers. Three developers were studied: methyl isobutyl ketone (MIBK), 2-ethoxyethanol (cellosolve), and methyl ethyl k