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Development of high throughput evaluation for photocatalyst thin-film

✍ Scribed by Akira Nakayama; Eiji Suzuki; Takashi Ohmori


Book ID
108417678
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
264 KB
Volume
189
Category
Article
ISSN
0169-4332

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Parallel synthesis together with highthroughput screening was used to identify candidate materials for integrated circuit applications that demand a superior high permittivity dielectric thin film. Specifically, we developed a "continuouscomposition spread" (CCS) technique to synthesize much of a ps