✦ LIBER ✦
Development of hafnium oxynitride dielectrics for radio-frequency-microelectromechanical system capacitive switches
✍ Scribed by Yi Zhang; Jian Lu; Kazumasa Onodera; Ryutaro Maeda
- Book ID
- 108262852
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 423 KB
- Volume
- 139
- Category
- Article
- ISSN
- 0924-4247
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