Development of an on-line isotope dilution laser ablation inductively coupled plasma mass spectrometry (LA–ICP-MS) method for determination of boron in silicon wafers

✍ Scribed by Chao-Kai Yang; Po-Hsiang Chi; Yong-Chine Lin; Yuh-Chang Sun; Mo-Hsiung Yang

• Book ID: 116904005
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 294 KB
• Volume: 80
• Category: Article
• ISSN: 0039-9140
• DOI: 10.1016/j.talanta.2009.09.013