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Development of an advanced micro-positioning system for increasing operation accuracy: consideration of high pressure sealing

✍ Scribed by Sabrina Pluemer; Kathrin Voges-Schwieger; Berend Denkena; Bernd-Arno Behrens


Book ID
113089513
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
447 KB
Volume
6
Category
Article
ISSN
0944-6524

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