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Development of a vertical wafer stage for high-vacuum applications

✍ Scribed by Erik Beckert; Andrew Hoffmann; Eugen Saffert

Book ID: 114155317
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 321 KB
Volume: 57-58
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(01)00517-2

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