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Development of a thermal micro-biosensor fabricated on a silicon chip

✍ Scribed by Bin Xie; Bengt Danielsson; Petronella Norberg; Fredrik Winquist; Ingemar Lundström

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
362 KB
Volume
6
Category
Article
ISSN
0925-4005

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## Abstract We report the fabrication of a silicon nanowire (SiNW) transistor array realized in a top‐down process on 4′′ silicon‐on‐insulator (SOI) wafers. This process is a second, optimized version combining thermal nanoimprint lithography and wet chemical etching to define planar nanowires and