Development of a target for laser-produced plasma EUV light source using Sn nano-particles

✍ Scribed by H. Tanaka; K. Akinaga; A. Takahashi; T. Okada

• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 169 KB
• Volume: 79
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-004-2828-2