Development of a simple 2.45 GHz microwave plasma with a repulsive double hexapole configuration

✍ Scribed by Arciaga, Marko; Tumlos, Roy; Ulano, April; Lee, Henry; Lledo, Rumar; Ramos, Henry

• Book ID: 121481563
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 981 KB
• Volume: 79
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.2987694