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Development of a Polymer Coating-Based Microlens Array on Isotropically Wet-Etched Quartz Substrates for Maskless Lithography Application

✍ Scribed by Nam, Minwoo; Oh, Haekwan; Seo, Hyunwoo; Song, Yotak; Yang, Sangsik; Lee, Keekeun


Book ID
115462087
Publisher
Institute of Pure and Applied Physics
Year
2010
Tongue
English
Weight
780 KB
Volume
49
Category
Article
ISSN
0021-4922

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