Development of a novel self-sensitive atomic force microscope for nondestructive measurement of micro vertical surfaces

✍ Scribed by T. Kobayashi; Y. Murakoshi; R. Maeda

• Publisher: Springer-Verlag
• Year: 2004
• Tongue: English
• Weight: 365 KB
• Volume: 10
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-004-0429-9