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Development of a multi-degree-of-freedom micropositioning, vibration isolation and vibration suppression system

✍ Scribed by Jaensch, M; Lampérth, M U

Book ID: 120026358
Publisher: Institute of Physics
Year: 2007
Tongue: English
Weight: 755 KB
Volume: 16
Category: Article
ISSN: 0964-1726
DOI: 10.1088/0964-1726/16/2/020

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