Development of a complex heat resistant hard coating based on (Ta, Si)N by reactive sputtering

✍ Scribed by J.W Nah; S.K Hwang; C.M Lee

• Book ID: 114194727
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 657 KB
• Volume: 62
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/s0254-0584(99)00142-x