Development of a collisional radiative model for interpreting the spectroscopic measurements of ArII line emission

A Linear Model for the Interpretation of

A Linear Model for the Interpretation of Optical Emission Spectroscopy Measurements in Low Pressure DC Magnetron Sputtering

✍ J. Schulte; G. Sobe; G. Reiss 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 902 KB

For a balanced dc magnetron discharge a linear model for the formation of excited and ionized species is presented. The consideration is based on collisional kinetic theory and a correlation of discharge current with ionization rates, and leads to normalized rate coefficients. The electron energy di