✦ LIBER ✦
Development of a 200 kV high current accelerator with post acceleration mass analysis for O+ implantation into silicon
✍ Scribed by G. Proudfoot; T.S. Green; M. Inman; C.M.O. Mahony
- Book ID
- 113278754
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 394 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0168-583X
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