Development and investigation of a standard fluid mechanical flow rate meter

✍ Scribed by VV Kuz'min

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 809 KB
• Volume: 49
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(97)00120-6

✦ Synopsis

An automated fluid mechanical flow rate meter which provides for measuring gas flow rates in vacuum over the range from lop5 to 1 m3Pa/s is described. The time it takes for the measurement to be carried out is not more than 5-15 min. A meter equation was derived, and constructional and operational features of the device were evaluated. The influence of additional processes and temperature variations on the meter readings was analyzed. The results of metrological investigations of the apparatus and the measured data concerning its practical use are presented.