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Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems

✍ Scribed by Gan, M. A.; Nikulina, E. A.

Book ID: 115402856
Publisher: Optical Society of America
Year: 2011
Tongue: English
Weight: 282 KB
Volume: 78
Category: Article
ISSN: 1070-9762
DOI: 10.1364/JOT.78.000706

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