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Determination of Trace Impurities of H2, O2, Ar, N2, CO, CO2, and Hydrocarbons in High-Purity Monosilane by Gas Chromatography

✍ Scribed by V. M. Vorotyntsev; G. M. Mochalov; A. K. Matveev; A. V. Malyshev; I. V. Vorotyntsev

Book ID
110418344
Publisher
SP MAIK Nauka/Interperiodica
Year
2003
Tongue
English
Weight
29 KB
Volume
58
Category
Article
ISSN
1061-9348

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