𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Determination of trace elements in a silicon single crystal

✍ Scribed by T. Takeuchi; Y. Nakano; T. Fukuda; I. Hirai; A. Osawa; N. Toyokura

Publisher
Springer
Year
1997
Tongue
English
Weight
282 KB
Volume
216
Category
Article
ISSN
1588-2780

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

VPD/TXRF analysis of trace elements on a
VPD/TXRF analysis of trace elements on a silicon wafer
✍ Motoyuki Yamagami; Masahiro Nonoguchi; Takashi Yamada; Takashi Shoji; Tadashi Ut πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 86 KB

A combination of vapor-phase decomposition (VPD) and total reflection x-ray fluorescence (TXRF) was used for the trace analysis of light elements (Na and Al) and transition metals (Fe, Ni, Cu, and Zn). TXRF measurement using the W Ma line was conducted for the high-sensitivity analysis of Na and Al.