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Determination of trace amounts of water in high-purity silane, arsine and phosphine by gas chromatography

✍ Scribed by Ding, Tianhui; Liu, Baoqi; Zhang, Hongyi; Liu, Yanfang; Gao, Zengzhu; Li, Ziyun


Book ID
120012692
Publisher
Royal Society of Chemistry
Year
1992
Tongue
English
Weight
358 KB
Volume
117
Category
Article
ISSN
0003-2654

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