Determination of thickness and refractive index of thin transparent multilayer films on silicon from ellipsometric data Computer-program description

✍ Scribed by Doherty, J.G.; Ryan, W.D.

• Book ID: 119747477
• Publisher: Institution of Electrical Engineers
• Year: 1975
• Weight: 265 KB
• Volume: 122
• Category: Article
• ISSN: 0020-3270
• DOI: 10.1049/piee.1975.0269