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Determination of thickness and defocus by quantitative comparison of experimental and simulated high-resolution images

✍ Scribed by Wayne E. King; Geoffrey H. Campbell

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 808 KB
Volume: 51
Category: Article
ISSN: 0304-3991
DOI: 10.1016/0304-3991(93)90141-j

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