Determination of the velocity distribution of sputtered atomic oxygen by laser-induced fluorescence in the vacuum-ultraviolet (130 nm)

✍ Scribed by A. Goehlich; M. Röwekamp; H.F. Döbele

• Publisher: Elsevier Science
• Year: 1991
• Weight: 43 KB
• Volume: 248
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(91)90362-u