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Determination of the thickness of thin titanium dioxide films from photoacoustic interference signals

✍ Scribed by Günther Heinrich; Hans Güsten

Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
266 KB
Volume
155
Category
Article
ISSN
0040-6090

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A non-destructive method for evaluation of the thickness of Ðlms over bulk substrates is presented. This method is based on evaluation of the parameters of the decay part of the x-ray signal ratio. For a selected energy range of each Ðlm thickness it is demonstrated that the decay part follows an ex