Determination of the thickness of a gold layer deposited onto silicon via reflected electron spectroscopy

✍ Scribed by V. P. Afanas’ev, P. S. Kaplya…

• Book ID: 120948449
• Publisher: Pleiades Publishing
• Year: 2013
• Tongue: English
• Weight: 202 KB
• Volume: 7
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/S1027451012080046