✦ LIBER ✦
Determination of the sputter rate variation pattern of a silicon carbide target for radio frequency magnetron sputtering using optical transmission measurements
✍ Scribed by G. Gálvez de la Puente; J.A. Guerra Torres; O. Erlenbach; M. Steidl; R. Weingärtner; F. De Zela; A. Winnacker
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 415 KB
- Volume
- 174
- Category
- Article
- ISSN
- 0921-5107
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