Determination of the optimal energy range for obtaining diamond-like films by ion implantation

✍ Scribed by J.C. Pivin; M. Allouard; G. Rotureau

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 906 KB
• Volume: 47
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(91)90309-k