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Determination of the neutral oxygen atom density in a plasma reactor loaded with metal samples

✍ Scribed by Mozetic, Miran; Cvelbar, Uros

Book ID: 120070423
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 382 KB
Volume: 18
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/18/3/034002

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