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Determination of the hydrogen concentration in silicon nitride films with the resonant nuclear reaction 1H(15N, αγ)12C

✍ Scribed by Evers, E.J.; Habraken, F.H.P.M.


Book ID
122439309
Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
284 KB
Volume
39
Category
Article
ISSN
0584-8547

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