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Determination of the energy release rate in the interfacial delamination of silicon nitride film on gallium arsenide substrate via nanoindentation

✍ Scribed by Lu, Mingyuan; Huang, Han


Book ID
125535690
Publisher
Cambridge University Press
Year
2014
Tongue
English
Weight
539 KB
Volume
29
Category
Article
ISSN
0884-2914

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