Determination of the degree of dissociation in an inductively coupled hydrogen plasma using optical emission spectroscopy and laser diagnostics

✍ Scribed by Abdel-Rahman, M; Gathen, V Schulz-von der; Gans, T; Niemi, K; Döbele, H F

• Book ID: 125507235
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 406 KB
• Volume: 15
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/15/4/005