✦ LIBER ✦

Determination of the average stress and its adjustment in thin silicon membranes used in various lithographies

✍ Scribed by B.A. Anderer; U.F.W. Behringer

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The method of interface stress adjustmen

✍ O.C. Zienkiewicz; R.W. Gerstner 📂 Article 📅 1961 🏛 Elsevier Science 🌐 English ⚖ 469 KB

Stress in the components of a thin film

✍ R. Carpenter; D. S. Campbell 📂 Article 📅 1969 🏛 Springer 🌐 English ⚖ 480 KB

The determination of lattice parameters

✍ E.L Haase 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 426 KB