Determination of structural parameters characterizing thin films by optical methods: A comparison between scanning angle reflectometry and optical waveguide lightmode spectroscopy

✍ Scribed by Picart, C.; Ladam, G.; Senger, B.; Voegel, J.-C.; Schaaf, P.; Cuisinier, F. J. G.; Gergely, C.

• Book ID: 126452862
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 277 KB
• Volume: 115
• Category: Article
• ISSN: 0021-9606
• DOI: 10.1063/1.1375156