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Determination of residual stress in deep submicron thick films by the critical buckling technique of annular thin plates

✍ Scribed by Da-Yong Qiao; Xiao-Pei Zheng

Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 488 KB
Volume: 18
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-011-1413-9

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