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Determination of pore-size distribution in low-dielectric thin films

โœ Scribed by Gidley, D. W.; Frieze, W. E.; Dull, T. L.; Sun, J.; Yee, A. F.; Nguyen, C. V.; Yoon, D. Y.


Book ID
120399941
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
298 KB
Volume
76
Category
Article
ISSN
0003-6951

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