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Determination of oxide thickness on an Si2N2OZrO2 composite by spectroscopic ellipsometry

✍ Scribed by M. Heima; H. Arwin; J. Chen; R. Pompe


Book ID
103973918
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
587 KB
Volume
15
Category
Article
ISSN
0955-2219

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