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Determination of oxide precipitate phase and morphology in silicon and germanium using infra-red absorption spectroscopy

✍ Scribed by Olivier De Gryse; Jan Vanhellemont; Paul Clauws

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 223 KB
Volume: 9
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.01.041

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