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Determination of nitrogen in silicon carbide by secondary ion mass spectrometry

✍ Scribed by B Ya Ber; D.Yu Kazantsev; A.P Kovarsky; R.R Yafaev

Book ID: 108417852
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 98 KB
Volume: 203-204
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(02)00732-8

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