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Determination of negative ion density in reactive gas plasmas using ion acoustic waves

✍ Scribed by Masako Shindo; Yoshinobu Kawai

Book ID: 108388372
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 140 KB
Volume: 407
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(02)00039-1

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