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Determination of negative-ion and electron parameters in an Ar/SF6 plasma

✍ Scribed by Stamate, E.; Ohe, K.

Book ID: 115474388
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 523 KB
Volume: 84
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.368406

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